摘要
Impact of band-engineering to the performance of charge trapping memory with HfO2/Ta2O5/HfO2 （HTH） as the charge trapping layer is investigated. Compared with devices with the same total HfO2 thickness, structures with Ta2O5 closer to substrates show larger program/erase window, because the 2nd HfO2 （next to blocking oxide） serving as part of blocking oxide reduces the current tunneling out of/in the charge trapping layer during program and erase. Moreover, trapped charge centroid is modulated and contributed more to the fiat-band voltage shift. Further experiments prove that devices with a thicker 2nd HfO2 layer exhibit larger saturate fiat-band shift in both program and erase operation. The optimized device achieves a 7 V memory window and good reliability characteristics.
Impact of band-engineering to the performance of charge trapping memory with HfO2/Ta2O5/HfO2 （HTH） as the charge trapping layer is investigated. Compared with devices with the same total HfO2 thickness, structures with Ta2O5 closer to substrates show larger program/erase window, because the 2nd HfO2 （next to blocking oxide） serving as part of blocking oxide reduces the current tunneling out of/in the charge trapping layer during program and erase. Moreover, trapped charge centroid is modulated and contributed more to the fiat-band voltage shift. Further experiments prove that devices with a thicker 2nd HfO2 layer exhibit larger saturate fiat-band shift in both program and erase operation. The optimized device achieves a 7 V memory window and good reliability characteristics.
基金
Supported by the National Basic Research Program of China under Grant No 2011CBA00602
the National Key Scientific and Technological Project under Grant No 2013ZX01032001-001-003
