摘要
用溶胶-凝胶法制备Al2O3-SiO2-ZrO2复合薄膜,研究溶胶成分和烧结工艺对薄膜质量的影响.通过黏度测试、热重分析、X射线衍射分析(XRD)及原子力显微镜分析(AFM)等测试方法对溶胶的稳定性、复合膜的热稳定性、晶相组成及表面形貌等进行分析.结果表明,当Al2O3∶SiO2∶ZrO2(mol/mol/mol)=1∶2∶0.5时,制得的溶胶粘度适中为3.22mPa·s、透明稳定,且干凝胶无开裂;以0.5℃/min的升温速率升至600℃焙烧2h,并在75℃和240℃附近以0.25℃/min的速率缓慢升温且适当保温后,可得外观透明、性能稳定的Al2O3-SiO2-ZrO2复合薄膜,并且薄膜呈致密性、表面平整、结构均匀、无裂纹.
Using Aluminum nitrate, TEOS and zirconium oxychloride as precursor, Al2O3- SiO2- ZrO2 composite membranes were prepared by sol-gel process. Influence of sol composition and sintering process on the quality of the A12Oa- SiO2- ZrO2 composite membranes were studied. Stability of sol, thermal stability, crystalline phases and surface morphology of Al2O3- SiO2- ZrO2 composite membranes were analyzed by viscosity test, thermogravimetric（TG-DTG）, X-ray diffraction（XRD） and atomic force microscope （AFM）. The results show that the prepared sol is transparent and stable and it has moderate viscosity when Al2O3-SiO2-ZrO2 （mol/mol/mol）=1 ： 2 ： 0. 5. Calcines the dried gel at a speed of 0.5 ℃/ min from room temperature to 600 ℃ for 2 h, meanwhile heats up slowly at a speed of 0. 25 ℃/min and insulates a few minutes on 75 ℃ and 240 ℃. Like this, Al2O3-SiO2- ZrO2 membranes of transparent, stable, smooth surface, good compactness and no cracking can be obtained.
出处
《膜科学与技术》
CAS
CSCD
北大核心
2015年第4期44-48,共5页
Membrane Science and Technology
基金
陕西省科技厅科技统筹资助项目(2013KTCQ03-20)
