全息光栅制作中基底定位误差分析及补偿方法

Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication

在全息光栅曝光光路中，基底的定位误差会直接影响光栅的技术指标。对平面全息光栅会造成光栅周期误差，对凹面全息光栅则会增大其像差。分析了全息光栅洛艾镜干涉系统中使用叠栅条纹方法调整干涉场周期时，标准光栅定位误差及基底定位误差对光栅周期的影响，指出通过调整基底使其与标准光栅表面平行可以补偿由标准光栅和基底定位误差带来的光栅周期误差。

Substrate positioning error in exposure system will directly harm the groove accuracy of holographic grating. It will cause grating period error in the plane holographic grating, or increase the aberration of the concave holographic grating. The effects on grating period with the positioning error of the standard grating as well as the substrate are analyzed, while moir6 fringe method is used to adjust the interference field period in the Lloyd＇s mirror interference system of holographic grating. The positioning error which can be compensated by adjusting the substrate parallel to the standard grating surface is pointed out.