摘要
本文介绍了激光调阻的基本原理和激光调阻系统,激光调阻工艺流程及工艺参数,调阻程序,切刻类型,分析了切槽缺陷和影响激光调阻精度的若干因素。
Laser trimming resistance mechanism and trimming system of thick film hybrid integration circuit were introduced in this paper. Laser trimming resist parameters, trimming resistance program, etching types and ance etch technological process, technological ing notch defect were also discussed The influence of laser trimming resistance technological parameters on the trimming resistance value precision were analysed in detail.
出处
《电子科学技术》
2015年第5期525-531,共7页
Electronic Science & Technology
关键词
激光调阻
激光脉冲
激光切刻
切槽缺陷
调阻精度
Laser Trimming Resistance
Laser Pulse
Laser Etching
Etching Notch Defect
Trimming Resistance Precision
