摘要
纳米技术是当代科技发展的一个新兴领域。本文简介了与机械制造有关的纳米加工技术，讨论了纳米加工技术的物理实质，介绍了与之相关的关键技术及其元器件等。
The technology in nanometer scale is a new domain of present-day scientific and technological development. This paper outlines the working technology in nanometer scale related to machine manufacturing, and introduces its key technologies and its device, and so on.
关键词
纳米加工技术
纳米技术
机械制造
加工精度
technology in nanometer scale
working in nanometer scale
machine manufacturing
