分析室真空度对原子探针测试数据质量的影响

Effect of Analysis Chamber Pressure on Experimental Data Quality of Atom Probe

根据三维原子探针的工作原理,分析了样品分析室内真空度对测试数据质量的影响,并对核反应堆压力壳钢样品进行了试验分析。结果表明:分析室内的真空度与获得试验数据的背底呈明显的线性相关关系,真空度越高,数据的背底越低;当数据背底高时,在成分分析过程中会引入较大的分析误差,且元素的含量越低,其分析误差越大,尤其当元素原子分数低于0.05%时,其分析误差会达100%以上。因此,稳定维持分析室的超高真空,对于获得高质量的试验数据至关重要。

The effect of analysis chamber pressure on the data quality was analyzed according to the working principle of three dimensional atom probe.A reactor pressure vessel steel sample was analyzed by atom probe tomography.The results show that the background had good linear relationship with the analysis chamber pressure,and the better vacuum,the less background could be obtained.The high background introduced serious analysis errors of elemental content,especially when the content of the element was very low.Therefor,maintaining the steady high vacuum of analysis chamber is very necessary for obtaining high quality experimental data.