提高扫描电镜图像质量的实践总结

Practice Summary of Improving the Image Quality of Scanning Electron Microscope

场发射扫描电镜是表征材料尺寸和形貌的最佳仪器设备,对不同导电性能样品观测条件的选择优化,具有重要的研究价值和实际意义。本文以不同导电性材料为研究对象,通过改变测试条件,比较图片的质量,发现对导电性稍差、荷电影响较小的样品,合理选择分辨率要求的加速电压,配合工作距离即可获得理想图片;对非导电、热稳定的无机材料,可在此基础上喷金、改变上下探头或照射电流也能实现;对绝缘、热不稳定的材料,需要改变工作模式、检测信号和拍摄方式才能减轻荷电和样品污染,本项研究为不同导电性材料的扫描电镜测试条件的选择优化提供了基础依据。

Field emission scanning electron microscopy is the best instrument for characterization of materials size and morphology. So, optimal observation condition research of different conductivity samples was important and practical. In this paper,different conductive materials were selected as the research object,the ideal image can be obtained by changing the test conditions, comparison of the picture quality. The result shows that the image pictures of a little bit worse conductivity samples can be easily obtained by reasonable selection of accelerating voltage combined with the working distance. For non conductive and thermal stability inorganic materials,image can also be realized by metal spraying,change detector or irradiation current. About the insulation, thermal unstable materials, work patterns, signal detection and capture mode were all selected in order to reduce the charge and sample contamination. Basic information for the optimal conditions selection of different conductive material were supplied in this paper.