火炮身管内壁磁控溅射氮化物层的性能

Properties of Nitride Coatings on Inside Wall of Reinforced Gun Barrel by Magnetron Sputtering

为了提高火炮身管的力学硬度和弹性模量，在PCrNi3Mo钢表面磁控溅射了TiAlN，CrAlN2种氮化物防护层。利用激光共聚焦显微镜、X射线衍射仪（XRD）对2种溅射层的形貌及结构进行了表征，采用纳米压痕仪测试了基材与2种溅射层的硬度和弹性模量。结果表明：CrAlN层表面相对平整光滑致密，表面粗糙度较小（R2=0．004～0．006μm），TiAlN层表面粗糙度相对较大（Ra=0．005～0．021μm）；CrAlN层表面生成的主晶相为CrN，TiAlN层表面生成的主晶相为TiN，2种晶相分别沿（110）和（200）面呈现择优取向；CrAlN层硬度和弹性模量分别为20．39，288．8GPa，TiAlN分别为14．51，267．70GPa，较基材（5．57，258．00GPa）均有显著提高，其中CrAlN层提高最为显著。

TiAlN and CrAlN protective coatings were deposited on the surface of PCrNi3 Mo steel by magnetron sputtering method.The composition and microstructure of the two coatings were characterized by confocal laser scanning microscope and X- ray diffractometer.The hardness and elastic modulus of the substrate material and the two coatings were measured by nano-indentation.Results showed that the surface of CrAlN was smooth and dense and the roughness was smaller(R_M =0.004 ~0.006 μm).The surface roughness of TiAlN coating was larger(R_M= 0.005 ~ 0.021 μm).The main crystalline phases of CrAlN and TiAlN coatings were CrN and TiN respectively,and two phases preferrentially orientated along(110) and(200)respectively.The hardness and elastic modulus of CrAlN coating were 20.39 GPa and 288.8 GPa,and those of TiAlN coating were 14.51 GPa and 267.7 GPa,which were much higher than those of the subatrate material(5.57 GPa and 258 GPa).