高精度磁浮式定位平台控制问题研究

Control of high-precision magnetic levitation positioning stage

高精度定位平台是光刻机、纳米测量与加工、微装配等微观领域技术的核心部件。磁浮式定位平台由于运动平台和驱动机构采用非接触式的磁浮技术,消除了两者间的摩擦、磨损等对运动精度造成的影响,提高了定位精度,成为近年来国内外精密定位技术研究的热点。简述国内外磁浮式定位平台的发展与研究现状,提出一种三点悬浮式的单运动部式的磁浮式定位平台,建立其悬浮方向上的单电磁铁模型,考虑到模型复杂性与不确定性、间隙干扰、负载扰动等原因对定位平台稳定悬浮控制问题的影响,引入自抗扰控制技术并且进行数值仿真与实现。结果表明,对悬浮方向上的控制问题引入自抗扰控制技术,不仅能实现稳定悬浮控制而且系统具有很强的鲁棒抗干扰能力。

High-precision stage is the key component in the scene of micro technology including photoetching machine, nano-measurement, process and micro-assemble, etc. Magnetic levitation positioning becomes the hot topic in positioning technology due to using non-contact maglev technology in motion stage and driving part, which can eliminate friction and attrition to motion and improve the precision. The development and researches of magnetic positioning stage in China and abroad are introduced and a new structure o{ magnetic levitation positioning stage is presented. Considering the uncertainty of the model and gap and load disturbance, active disturbance rejection control is proposed to maglev positioning stage for the problem of stable levitation control based on the single magnet model. The simulation and experiments show that the method meets the demands of high-precision and stable levitation control and has the strong ability of robust anti-disturbance.