摘要
Ta2O5作为高折射率材料有着广泛的应用,由于具有不同的色散和吸收,以及不同的工艺条件,Ta2O5材料的光学常数会出现差异。介绍了一种采用电子枪蒸发并加以离子束辅助技术制备Ta2O5薄膜的方法,实验基于柯西模型(Cauchy Model)对Ta2O5薄膜在近紫外到近红外的光学常数进行了拟合,并说明了Ta2O5材料在短波通滤光片中的应用。
Ta2O5 is widely used as a kind of high refractive index film material. The optical constant is vary because of dispersion and absorption as well as different technological conditions. A kind of using electron gun of fabrication of thin film evaporation and ion beam assisted method is introduced. The test based on the Cauchy model of the films in the near ultraviolet to near infrared optical constants are fitted, and illustrates the application of the material in short wavelength pass filter.
出处
《激光与光电子学进展》
CSCD
北大核心
2015年第9期243-246,共4页
Laser & Optoelectronics Progress
基金
国家自然科学基金(51275551)
关键词
材料
光学材料
光学常数
薄膜
拟合
materials
optical material
optical constants
thin films
fitting
