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Three Beam interfering Pressure Gauge

Three Beam Interfering Pressure Gauge
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摘要 Abstract: In order to solve the problem of high precision, complete electric insulating detection of the pressure measuring system, we have developed the three - beam interferometer. In this paper, the operation principle, structure of the system and measuring results are given. Abstract: In order to solve the problem of high precision, complete electric insulating detection of the pressure measuring system, we have developed the three - beam interferometer. In this paper, the operation principle, structure of the system and measuring results are given.
出处 《Semiconductor Photonics and Technology》 CAS 1997年第1期44-49,共6页 半导体光子学与技术(英文版)
关键词 Fourier Transformation GAUGE Optical Path Difference Photodetec-tors Three Beam Interferometer 压力计 光检测计 三射线妨碍 光路差异
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