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新型蓝宝石加工用高效水基金刚石研磨液的性能比较 被引量:2

Properties of a high-performance water-based diamond slurry
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摘要 为提高研磨液加工效率,改进工件表面加工质量,采用表面改性技术、助剂复配技术、超声分散技术,制备了一种蓝宝石加工用高效水基金刚石研磨液。使用该研磨液对蓝宝石进行研磨加工,可实现材料去除速率1.35μm/min、表面粗糙度值Ra16nm、表面无明显划痕等优异研磨加工效果。将自制的研磨液与同类研磨液产品的使用性能进行对比分析,结果表明:自制的金刚石研磨液在材料去除速率、加工后工件表面粗糙度值Ra以及表面划痕方面均优于其他同类产品。 To improve the efficiency of lapping and the quality of workpiece surface, surface modification technology,fertilizer compound technology and ultrasonic dispersing technology were used to make high-performance water-based diamond slurry.Application of the diamond slurry on lapping sapphire showed excellent lapping performance,such as material removal rate of 1.35 μm∕min,R a value of 1 6 nm,and no obvious surface scratches.Comparing self-made slurry with domestic and foreign slurries,it was showed that self-made diamond slurry had better removal rate,lower sapphire surface roughness value and less scratches.
出处 《金刚石与磨料磨具工程》 CAS 2015年第4期33-36,46,共5页 Diamond & Abrasives Engineering
基金 科技部科研院所专项资金项目(2009EG119127)
关键词 蓝宝石 金刚石研磨液 去除速率 表面划痕 研磨加工 sapphire diamond slurry removal rate surface scratches lapping process
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