摘要
This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application.
This paper presents a high-Q RF MEMS oscillator consisting of a micro-disk resonator and low noise feedback circuits. The oscillator has high frequency stability and low phase noise. The two-port resonator was hermetically encapsulated using low-cost Sn-rich Au-Sn solder bonding, which significantly improves the frequency stability. A low noise oscillator circuit was designed with a two-stage amplifying architecture which effectively improves both the frequency stability and phase noise performance. The measured phase noise is -96 dBc/Hz at 1 kHz offset and-128 dBc/Hz at far-from-carrier offsets. Moreover, the medium-term frequency stability and Allan deviation of the oscillator are 4-4 ppm and 10 ppb, respectively. The oscillator is a promising component in future wireless communication application.
基金
Project supported by the National Natural Science Foundation of China(Nos.61234007,61404136)
the State Key Development Program for Basic Research of China(Nos.2011CB933102,2013YQ16055103)
