低温喷雾热解制备ZnO薄膜的研究现状及进展

Present Status and Development Trend of ZnO Thin Film Preparation by Low Temperature Spray Pyrolysis

低温喷雾热解(Low temperature spray pyrolysis,LTSP)制备ZnO薄膜具有低成本、可大面积制膜的优点,符合卷对卷生产技术要求,在柔性触摸显示、有机电致发光(OLED)、有机光伏(OPV)等领域中具有重要的应用前景。通过对前驱液配方的改进及设备的优化,LTSP实现了在柔性衬底上制备ZnO薄膜。因此,从不同溶液体系讨论国内外近年来LTSP制备ZnO薄膜技术的研究现状、进展及其应用价值,同时介绍本课题组近期在该领域的研究进展,供有机光电器件领域同行参考。

Low temperature spray pyrolysis （LTSP） is a cost-effictive technique for preparation of ZnO film on a large scale. It is compatible with roll-to-roll technology and thus plays an important role in fabrication of flexible touch display, organic light emitting display （OLED） and organic photovoltage （OPV）. ZnO films deposited on flexible substrate can be achieved by solution modification and deposition apparatus optimization. Therefore, present status, development trend and practical application of ZnO thin film prepared by LTSP technique are discussed. The recent progress in this area from our group is also introduced.