多晶硅还原炉的模拟腐蚀试验研究

Research on the Simulation of Corrosion Test of Polysilicon Reduction Furnace

在对还原炉进行检验时,在其内筒(316L不锈钢)焊缝附近发现了点腐蚀和裂纹,为分析上述缺陷形成原因,笔者设计了一个还原炉腐蚀缺陷的试验研究系统,对316L不锈钢进行腐蚀试验研究。通过金相显微镜、扫描电镜观察及EDS分析等手段,研究了腐蚀机理,并提出了预防措施。

The pitting corrosion and crack was found around the weld joint of the inner cylinder （316L stainless steel） in the reduction fiLrnace, a test system was designed to research reduction furnace corrosion defects, and perform the corrosion test of 316L stainless steel. With the analysis of metallographic microscope, scanning electron microscope and EDS, the study clarified the corrosion mechanism, presented the prevention measures.