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低驱动电压RF MEMS开关设计过程中的有限元分析 被引量：1

Design and Simulation of a Low Voltage RF MEMS Switch
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摘要 介绍了RF MEMS开关的工作原理和基本结构,给出采用Ansys有限元分析方法仿真RF MEMS开关的流程及方案。对一种新型的低驱动电压RF MEMS开关,使用Ansys有限元软件进行分析:静态分析求解开关的下拉电压,动态分析得到开关时间,并给出该开关的应用实例。 This paper first introduced the principle of RF MEMS switch, then, the simulation of RF MEMS switch by using Ansys finite element analysis method. It carried out the static analysis to solve the drop-down voltage and the dynamic analysis of the switching time. Finally, it cited an example of the low driving voltage RF MEMS switch.
作者 伍文昌 胡宜芬
机构地区 信阳职业技术学院汽车学院
出处 《新乡学院学报》 2015年第9期53-55,63,共4页 Journal of Xinxiang University
关键词 RF MEMS开关 ANSYS有限元 低驱动电压 开关时间 RF MEMS switch Ansys finite element low-driving voltage switching time
分类号 TN402 [电子电信—微电子学与固体电子学]
  • 相关文献

参考文献7

  • 1李国厚,白林峰.微机电系统的发展与应用[J].微计算机信息,2003,19(9):1-2. 被引量：7
  • 2REBEIZ G M. RF MEMS Theory,Design and Technology [M].黄庆安,廖小平,译.南京:东南大学出版社,2005:74-76.
  • 3董乔华,廖小平,黄庆安,黄见秋.RF MEMS开关吸合电压的分析[J].Journal of Semiconductors,2008,29(1):163-167. 被引量：6
  • 4DU Y J, BAO J F, WU W C, et al. Design of a Novel 5- bit Distributed MEMS Phase Shifter[C ]//IEEE, 2010 International Conference on Communications, Circuits and Systems (ICCCAS), Chengdu, 28-30 July, 2010: 706- 709.
  • 5NIESSNER M, IANNACCI J, SCHRAG G, et al. Experi- mental Analysis and Modeling of the Mechanical Impact During the Dynamic Pull-in of RF-MEMS Switches[C]// IEEE, Advanced Semiconductor Devices and Microsys- tems, 2010 8th International Conference, Smolenice, Oc- torber 25-27, 2010: 267-270.
  • 6MAFINEJAD Y, KOUZANI A Z, MAFINEZHAED K, et al. Design and Simulation of a Low Voltage Wide Band RF MEMS Switch[C]//IEEE, International Conference on Systems, Man and Cybernetics, San Antonio, TX, USA, October 11-14, 2009: 4623-4627.
  • 7SON C, ZIAIE B. Pull-in Instability of Parallel-plate Electrostatic Microactuators Under a Combined Variable Charge and Voltage Configuration [J]. Applied Physics Letters, 2008, 92: 013509.

二级参考文献14

  • 1Yao J J. RF MEMS from a device perspective. Journal of Micromechanics and Microengineering,2000,10,9.
  • 2Rebeiz G M. RF MEMS theory, design,and technology. Hoboken, NJ : Wiley, 2003.
  • 3Hector J,de Santos L. RF MEMS circuit design for wireless communications, Boston: Artech House ,2002.
  • 4Chowdhury S,Ahmadi M, Miller W C. Pull-in voltage study of electrostatically actuated fixed-fixed beams using a VLSI on-chip interconnect capacitance model. Journal of Micromechanical Systems,2006,15(3) :639.
  • 5Pamidighantam S, Puers R, Baert K, et al. Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions. Journal of Micromechanics and Microengineering,2002,12 : 458.
  • 6Muldavin J B, Rebeiz G M. High-isolation CPW MEMS shunt switches-part 1: modeling. IEEE Trans Microw Theory Tech, 2000,48(6) :1045.
  • 7Schauwecker B, Mehner J, Strohm K M, et al. Investigations of RF shunt airbridge switches among different environment conditions. Sensors and Actuators, 2004,114 : 49.
  • 8Elata D,Bamberger H. On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources. Journal of Microelectromechanical Systems, 2006,15 (1) 131.
  • 9Nielson G N, Barbastathis G. Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators. Journal of Microelectromechanical Systems, 2006,15 (14) : 811.
  • 10Peroulis D, Pacheco S P, Katehi L P B. RF MEMS switches with enhanced power-handling capablities. IEEE Trans Microw Theory Tech,2004,52(1) :59.

共引文献11

同被引文献7

引证文献1

新乡学院学报
2015年 第9期

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