具有温度补偿功能的等应变梁双FBG真空静电电压传感器

Vacuum electrostatic voltage sensors based on uniform strain beam and twin-FBGs with temperature compensation

为了实现高电压的精确测量,提出了一种具有温度补偿功能的光纤布拉格光栅（FBG）真空静电电压传感器。基于所设计的真空静电传感器构建了高压静电电压传感实验系统,实现了静电电压的精确测量;同时,利用参数一致的双FBG结构方案,实现了传感器的温度补偿功能。实验结果表明：本文传感器可实现5-39kV直流高压和交流高压有效值的测量,并且能够达到较高的精度,5-12kV的计算精度为1.25%,12-39kV的计算精度为0.55%,传感曲线的拟合度为0.999 76。本文构建的系统,抗干扰能力强、精度高和稳定性好。

In order to realize high precise measurement of high voltage,a uniform strain beam FBG vacuum electrostatic voltage sensor with temperature compensation function is proposed.The configuration and coating of the sensor are designed by the theoretical analysis of the working principle of the sensor.The high voltage electrostatic voltage sensing system is built based on the designed electrostatic voltage sensor,the high precise measurement of electrostatic voltage is realized,and it can achieve temperature self-compensation function of sensor by using the same parameters of the twin-FBG structure scheme.The experimental results show that the sensor can measure DC voltage and AC root-mean-square voltage in 5-39 kV.Moreover,the measurement accuracy is 1.25%in 5-12 kV and 0.55%in 12-39 kV,and fitting degree of the sensing curves is 0.999 76.The sensor achieves the requirement of strong anti-interference ability,high precision,reliability and stability.