可调谐氮化硅波导微环谐振腔滤波器研究

Research on tunable microring resonator filter based on Si_3N_4

设计并制备了一种基于热光效应的集成可调谐氮化硅(Si3N4)波导微环谐振腔滤波器,通过采用马赫-曾德干涉仪(MZI)构成的可调谐耦合器控制耦合区耦合比,以实现滤波器消光比的调谐。设计并优化了微环谐振腔的波导截面尺寸、弯曲半径和耦合区波导间隔等参数,并通过光刻、反应离子刻蚀(RIE)等工艺制备了两种不同弯曲半径的Si3N4波导微环谐振腔。实验结果表明,本文器件在波长1 550nm附近处的自由光谱范围(FSR)为68pm,3dB带宽约为16pm,品质因子Q达到了9.68×104,消光比可调范围约为17dB。

An integrated silicon nitride waveguide microring resonator based on thermo-optical effect is designed and fabricated.The device adopts the tunable coupler constituted by the Mach-Zehnder interferometer（MZI）which controls the coupling ratio to tune the extinction ratio.Besides,the size of waveguide,bend radius,the gap size in the coupling region and other parameters are designed and optimized.Two silicon nirtride waveguide microring resonators with different bend radii are fabricated by the lithography,reactive ion etching（RIE）and other micro fabrication processes.The experimental results show that around the wavelength of 1 550 nm,the free spectral range,3dB bandwidth,Qfactor,tunable range of the extinction ratio are 68 pm,16pm,9.68×10^4,and 17 dB,respectively.The research of this tunable microring resonator filter is very promising for the optical communication and the microwave photonic filtering.