摘要
对比研究Al2O3-SiC复相陶瓷激光直接刻蚀和水射流辅助激光刻蚀的作用效果,并讨论水射流流速对刻槽形状和蚀除量的影响。研究结果表明,水射流辅助激光刻蚀的加工方法能够大大减少刻槽内熔渣的堆积,有效降低再铸层厚度,显著提高刻槽的加工质量。在一定范围内,水射流流速越大,刻槽的形状越来越接近于标准的"V"槽;水射流流速不断增大时,激光的能量损失越多,导致刻槽的蚀除量不断变小。
This paper compares the impact of laser direct etching and water jet assisted laser etching on Al2O3-SiC composite ceramics,and discusses the effects of the velocity of water jet on the shape and removal amount of groove.The results show that：The processing method of water jet assisted laser etching can greatly reduce the molten slags of groove,and decrease the thickness of recast layer efficiently,the quality of groove can be improved obviously;Within a given range,the velocity of water jet becomes bigger,the shape of groove becomes more accessible to standard V-groove;When the velocity of water jet increases continuously,the loss of laser energy is more and more,which makes the removal amount of groove become small progressively.
出处
《应用激光》
CSCD
北大核心
2015年第4期483-487,共5页
Applied Laser
基金
国家自然科学基金资助项目(项目编号:51175229)
