利用测温电路线性补偿MEMS加速度计零偏温漂

Linear Compensation to Thermal Bias Drift of MEMS Accelerometer Based on Temperature Measurement Circuit

为提高MEMS加速度计温度稳定性,针对MEMS加速度计零偏温度漂移问题,提出了一种基于闭环点位置控制的零偏温漂抑制方法,该方法利用测温电路生成线性控制电压,在不同温度下将闭环点位置控制于零反馈位置附近,此时闭环加速度计的零偏近似为0,在全温范围内的零偏漂移量可显著降低。对闭环MEMS加速度计进行温度循环试验,试验结果表明,加入线性控制电压后闭环加速度计的零偏温漂下降到0.1 mg/℃以内,与不加线性控制电压相比提高了一个数量级以上。该方法实现简单,可操作性强,无需额外硬件开销,利于工程化实现。

Aiming at the thermal bias drift of MEMS accelerometer,a method to depress the drift based on closed-loop position control was proposed.A linear control voltage generated by temperature measurement circuit encloses the closed-loop position to the zero-feedback position,led to the bias output of the accelerometer close to zero,and the thermal bias drift can be reduced signifi-cantly.The temperature cycling test results indicate that the thermal bias drift is depressed to 0.1 mg/℃ under the linear control voltage,and an order of magnitude of enhancement is achieved.The advantages of simplicity,operability,economical efficiency make it suitable to engineering approach.