紫外可见NMOS线阵图像传感器量子效率的定标研究

Study on the calibration for quantum efficiency of ultraviolet/visible NMOS linear image sensors

作为一种新型紫外可见线阵图像传感器,紫外可见NMOS已经应用于国外的空间遥感探测中,但是目前在国内相关研究甚少。在紫外可见波段针对NMOS的重要光电性能参量——量子效率进行了定标研究,为NMOS线阵图像传感器在紫外空间遥感探测的应用奠定了基础。基于美国标准技术研究院（NIST）标定的标准探测器,构建了一套NMOS量子效率高精度定标系统。在250～700 nm波段范围内,通过直接标定NMOS入射窗口处接收到的光子数,结合NMOS信号处理及读出单元得到NMOS的响应电子数,标定其量子效率。结果表明NMOS线阵图像传感器的量子效率在紫外波段达到34%@275 nm,在可见波段达到80%@550 nm。通过不确定度分析,量子效率的测量不确定度为2.5%。

As a new type of ultraviolet-visible linear array image sensor, NMOS has been applied to ultraviolet remote sensing abroad, but its research is still less domestically at present. This thesis aims at calibrating quantum efficiency of NMOS liner image sensor, which permits further application at space ultraviolet remote sensing. On the basis of standard detector provided by NIST, a high-accuracy calibration system was established to research quantum efficiency of NMOS linear image sensor. The number of photos, received by NMOS linear image sensor, was calibrated directly in this paper. And the number of electrons was calculated according to the signal processor and signal readout circuit of NMOS linear array image sensor. Then quantum efficiency of NMOS liner image sensor in 250-700 nm spectral range was calibrated. The result shows that quantum efficiency of NMOS liner image sensor reaches 34% @275 nm and 80% @550nm. Through uncertainty analysis of quantum efficiency, the combined uncertainty is determined as 2.5%.