跨尺度二维工作台系统研制

Development of Trans-dimensional 2D Platform System

为实现大行程、纳米分辨力的定位目标,研制了跨尺度二维工作台系统。采用大行程宏动台和六自由度微动台组合的方式,搭建了宏/微双驱动高精度二维工作台系统。该系统利用机器视觉技术,采用图像处理方法确定系统中各个零件的位置和方向,宏动台高速移动实现粗定位,通过微动台与宏动台的循环配合工作,最终实现二维工作台系统的纳米级定位精度。实验结果表明,200mm×200mm二维工作台的定位精度在0.6μm左右,该工作台系统具备了大行程、定位时间快、智能化等优点。

In order to achieve the goal of long-stroke and nanometer resolution positioning, trans-scale 2D platform system is developed in this paper. The combination of long-stroke macro-drive platform and 6-DOF micro-drive platform is adopted in this paper, to build macro/micro dual-drive high-precision 2D platform system. This system adopting machine vision technology and image processing method to positioning the position and direction of each part, and to achieve rough positioning by adopting high speed movement of macro-drive platform. Finally, with the cycling work of macro-drive plat- form and micro-drive platform to achieve nano-positioning o（2D platform system. Experiment result is shows that the posi- tioning accuracy of 200mm × 200mm 2D platform is about 0.6μm, this platform has the advantage of long-stroke, quick positioning, intelligence.