摘要
研制了一台零电压软开关中频交流脉冲放电电源,应用于碳纳米管的制备,以乙炔作为碳源,在反应容器中通入氦气,在两电极之间激发出电弧为碳纳米管生长提供环境。本文给出了交流脉冲电源的设计思路和实现方案。该电源采用三相桥式不可控整流拓扑电路、PWM整流电路、半桥逆变电路的方案。根据放电过程中电流急剧上升的特点,绕制了具有高漏感的变压器,利用变压器漏感来抑制放电过程电流上升的速率,同时实现了IGBT的零电压开通。该电源输出峰值电压5kv-12kv连续可调,频率为8k Hz,脉宽占空比16%~20%可调。通过对放电试验结果的观测,此电源各项指标运行正常,工作稳定,电磁干扰小,具有良好的应用价值。
A zero-voltage soft-switching medium-frequency AC pulse power supply was prepared for the carbon nanotubes, and making acetylene as carbon source in the reaction vessel, the arc is supplied to the helium, and the electric arc is excited between the two electrodes to provide the environment condition for the carbon nanotube growth. The designed idea and implementation schemes were given about the AC pulse power supply, This power supply adopted the scheme of three-phase bridge uncontrolled rectifier topology circuit, PWM rectifier circuit, and half bridge inverter circuit .According to the current rises sharply during the discharge time. We winded the transformer with high leakage inductance. The zero-voltage IGBT opening was realized by means of the leakage inductance of the transformer to suppress the rise of discharge current process. The power supply output peak-voltage is continuously adjustable between 5kv^12kv and the frequency is 8 kHz, and the pulse duty ratio is 16% ~20%. Through the discharge test results, this power source has normal operation indexes, stable working status, low electromagnetic interference, and better application values.
出处
《真空》
CAS
2015年第5期70-74,共5页
Vacuum
关键词
中频逆变
零电压开通
慢降栅压
medium-frequency invert
zero-voltage turn-on
slow drop gate-voltage