摘要
大气压低温等离子体射流的长度和温度是射流的两个重要的参数,利用10k Hz的正弦高压驱动在大气环境中产生了稳定的Ar等离子体射流,并对射流的长度特性和温度特性进行了研究。研究发现射流的长度随着外加电压的增加而增加,随着气流速率的增加先增加,到达一定值后又逐渐减小。利用光纤温度计和光谱仪测量并计算了射流的宏观温度以及电子激发温度,发现射流的宏观温度接近室温,而电子激发温度均小于1.5×104K,基本属于冷等离子体范畴,并且它们均随着外加电压的增加而增加。
Length and temperature are two important parameters of the atmospheric plasma jet. An argon plasma jet has been generated in the atmospheric environment driven by 10 k Hz sinusoidal high voltage. The length and temperature of the plasma jet were measured by the optical and electrical instruments. The results show that the length of the plasma jet increases with the applied voltage,but first increases with the flow rate and then decreases gradually with a further increase of the flow rate. The jet temperature and the electron excited temperature were measured and calculated by the optical fiber thermometer and spectrometer. The jet temperature is closed to the room temperature and the electron excited temperature is less than 1. 5 × 10^4 K,which is among the range of the cold plasma.Moreover,both of them rise with the voltage increasing.
出处
《电子器件》
CAS
北大核心
2015年第4期730-733,共4页
Chinese Journal of Electron Devices
基金
江苏省自然科学基金项目(BK2012737)
国家自然科学基金项目(61271053
50907009)
中央高校基本科研业务费专项资金项目(2242011R30018)
关键词
等离子体射流
长度
温度
电子激发温度
外加电压
气流速率
光谱强度
plasma jet
length
temperature
electron excited temperature
applied voltage
flow rate.TIF
Spectral intensity