铅基(Pb,La)(Zr,Ti)O_3反铁电厚膜微驱动结构的特性测试

Micro-actuator device characteristics study on lead-based antiferroelectric thick films of(Pb,La)(Zr,Ti)O_3

采用金属醇盐为前驱体的溶胶-凝胶工艺,实现了PLZT反铁电厚膜晶圆级的制备。基于铅锆反铁电材料的相变应变效应和快速响应特性,结合微纳兼容制造关键技术,研制出具有大应变、快响应、低驱动特性的硅基(Pb,La)(Zr,Ti)O3反铁电厚膜微悬臂梁构件。3种激励模式的测试结果表明,定频模式下梁的最大位移和速率相对于扫频模式下高出数倍,且定频模式(Square)更有利于激发反铁电材料相变,使得微悬臂梁驱动构件产生更大的应变和更快的响应速度,为大行程驱动位移和快速响应新型微执行构件的设计提供一种新的技术途径。

Taking the metal alkoxide as a precursor,the wafer grade of(Pb,La)(Zr,Ti)O3(PLZT)anti-ferroelectric thick films were fabricated by the sol-gel process on silicon substrate.Based on the strong field induced strain and the sharp phase switching of anti-ferroelectric materials and combined with key technologies of micronano compatible manufacturing,the microcantilevers was presented with excellent large strain capacity,rapid response speed,low drive voltage.The experimental results of 3excitation modes showed that the maximum displacement and velocity of microcantilevers under the fixed frequency(square)is several times larger than that under the sweep(or scan)frequency.The phase transition of anti-ferroelectric materials were so much more excited underthe fixed frequency(square)than that under the sweep frequency that caused the larger strain capabilities and higher response speed in the micro-cantilevers,which was a new technical approachto design micro-actuators with characteristics of large drive displacementand rapid response.