集成电路FT制程高压测试方法研究

Integrated Circuit FT and High Voltage Test Method Research

随着经济发展和科学技术的进步,集成电路(Integrated Circuit)产业保持着持续、快速的发展。作为集成电路产业链中的一个重要环节,集成电路测试在评价集成电路电性能、质量和可靠性等方面提供了有力的技术支撑,其中集成电路高压测试是进行电源管理、高压驱动等一系列芯片耐压单元性能检测的重要环节。主要研究集成电路成品高压测试过程中存在的一些问题以及相应的解决方案。

The development of economy and the progress of technology, the integrated circuit industry has achieved rapid development. Integrate circuit testing is an important part of integrate circuit industry, Integrate circuit test in the evaluation of the performance of integrate circuit, and provides a technical support for a few power quality and reliability. Mainly for the integrate circuit of high voltage test was conducted for power management, high voltage driver and a series of chip voltage withstand test is an important link. The paper mainly studies some problems of integrate circuit product high voltage testing process and corresponding solutions.