流化床法制备多晶硅过程研究进展

Research Progress of Polysilicon Production Technology With Fluidized Bed Chemical Vapor Deposition(FBCVD) Method

介绍了国内外对于流化床法制备多晶硅过程中无定形硅粉成核机理、反应器加热方式的研究。随着研究的不断深入,经典成核理论与基于聚合反应的成核机理已成为目前两种比较成熟的机理,但同时又存在着缺陷。为了抑制壁面硅沉积的发生和无定形硅粉的形成,研究者先后提出外加热、内加热、微波加热等加热方式及相应的流化床反应器结构。

The nucleation mechanism of amorphous silicon powder and the heating method of reactor during production of polysilicon by the fluidized bed chemical vapor deposition （FBCVD） method were reviewed. As the research going, the classical nucleation theory and the nucleation mechanism based on polymerization reaction have been widely adopted, but they still have defects. To avoid the polysilicon deposition on the wall of the heater and the amorphous silicon powder formation, new heating methods including external heating, internal heating and microwave heating were studied as well as corresponding partition structure of FBCVD reactor.