基于静电力偏移的弱静电场测量

Weak electrostatic field sensor using electrostatic force deflection of a vibrating micro spring supported membrane

本设计利用微型弹簧支撑膜静电场传感器在微弱静电场下会发生微弱位移变化的原理制作而成.首先利用函数信号发生器驱动传感器的支撑膜振动,并将该传感器放入微弱静电场中,支撑膜的振动平衡位置受静电场力作用将发生改变,利用激光光点反射放大法测量平衡位置的微小变化,从而获得微弱静电场的强度.通过测量由两圆形金属板构成的1 V/mm微弱静电强,当传感器处于平行板的中心位置时,测量结果相对误差小于3%.

An electrostatic field sensor is shown by using a vibrating micro-spring supported membrane as the sensing element. The sensing mechanism involves electrostatic force to deflect the membrane, and a photoelectric sensor to measure membrane movement based on the laser reflected amplification method. A bias voltage applied to the membrane can be used to increase measurement sensitivity. Electrostatic field is detected by measuring the deflection of equilibrium position of the membrane. It is presented for the measurement of de electric field. Measure- ment error is about 3% for a 1V/mm de weak electrostatic field. The application of this sensor is for weak electric field monitoring.