基于波长移相的光纤投影三维轮廓测量方法

Fiber-Optic Interferometer Projection Based on Wavelength Phase-Shifting for Three-Dimensional Profile Measurement

提出了一种光纤干涉投影测量三维形貌的新方法。采用具有良好正弦性的光纤激光干涉条纹作为载波条纹进行投影,并且激光光源波长可调谐,通过精确控制电流源电流以改变激光波长来达到干涉条纹相位移动的目的,进而通过移相算法可求解出相位值乃至被测物体的三维轮廓。实验中,相位提取采用重叠四步平均算法,其能够减小移相误差使得系统在50 mm口径范围下均方根值控制在30μm以内。

A novel three-dimensional profilometry technique by optical fiber interference projection is presented. This technique uses fiber laser interference fringes with fine sinusoidal property as carrier fringes to project. Take the wavelength-modulated laser as the light source to make the purpose of interference fringe phase-shift by accurately changing the current. The phase and three-dimensional （3D） profile of object can be calculated by the phase-shifting algorithm. In this experiment, the repetitive deviation of object diameter under 50 mm is less than 30 tLm root-mean-souare bv using overlat）nin~ averaging 4-frame algorithm.