摘要
对涂覆DLC薄膜的MEMS球轴承的接触性能进行理论研究。根据微球轴承的接触型式,建立微球与表面涂覆DLC薄膜的滚道之间的有限元模型,考察不同DLC薄膜弹性模量和厚度,以及不同微球材料和直径对微球轴承接触特性的影响。结果表明,高弹性模量的厚DLC薄膜可以降低微球轴承滚道表面的最大径向拉应力和界面剪切应力,但却提高了最大接触压力;轴承内的轴向最大von Mises等效应力和界面应力梯度可通过减小DLC薄膜的弹性模量或增加薄膜厚度来降低;直径较大的440C不锈钢微球可以改善涂覆DLC薄膜的微球轴承的接触性能。
The contact characteristics of the ball bearing coated with DLC in MEMS were studied theoretically.Accordingto the contact of the microball bearing, a FEM model for the microball and the raceway coated with DLC was built. Theeffects of the elastic modulus and thickness of DLC film and the material and diameter of microball on the contact charac-teristics of microball bearing were investigated.The results show that the high elastic modulus and thick DLC film can re-duce the maximum radial tensile stress along the raceway surface and the maximum shear stress along the interface, where-as increasing the maximum contact pressure.The maximum von Mises stress along the axial direction and the stress gradientalong the interface in the bearing can be reduced by decreasing the elastic modulus or increasing the thickness of the DLCfilm.The larger diameter 440C stainless steel microball can improve the contact characteristics of microball
出处
《润滑与密封》
CAS
CSCD
北大核心
2015年第10期1-6,35,共7页
Lubrication Engineering
基金
国家自然科学基金项目(51275046)
