摘要
采用非平衡磁控溅射法在Si(100)片和M2工具钢上制备Ti-DLC薄膜。通过X射线光电子能谱仪、拉曼光谱仪和扫描电子显微镜分析薄膜的结构以及微观形貌;利用球-盘摩擦磨损试验机研究不同载荷下Ti-DLC/Si3N4对摩副在水中的摩擦学特性。结果表明,Ti-DLC薄膜具有致密的表面结构,含有较多的C-Csp2键;摩擦介质为去离子水时,薄膜的摩擦因数随着载荷的增加先减小后增大,且载荷增加到一定值后,摩擦因数几乎不再变化;薄膜磨损率随着载荷的增加先升高后降低,而相应的Si3N4小球磨损率却是先减小后增大,这主要是由于Si3N4在水中易于发生水合反应,促使摩擦接触表面变得非常平滑,从起到降低摩擦因数,在一定程度上减少磨损的作用。
Ti-DLC coatings were deposited on Si （100） wafer and M2 tool steel using unbalanced magnetron sputtering.The microstructure and morphologies of Ti-DLC coatings were analyzed and observed using X-ray photoelectron spectrosco-py,Raman spectroscopy and scanning electron microscope （SEM）.The friction properties of Ti-DLC/Si3N4 tribopairs inwater at different loads were investigated using ball-on-disk tribometer.The results show that Ti-DLC coatings have densesurface structure and many C-Csp2 bonds.The friction coefficient is first decreased,and then increased with the increasingof normal load.When the normal load reaches to a certain value, the value of friction coefficient is almost unchanged.Thewear rate of the coatings is first increased and then decreased with the increasing of normal load, while that of balls exhibitthe opposite rule,which is attributed to the easy tribo-hydration reaction of Si3N4 balls in water, and the contact surfacebecomes smooth, thus the friction coefficient and wear rate are reduced.
出处
《润滑与密封》
CAS
CSCD
北大核心
2015年第10期23-29,40,共8页
Lubrication Engineering
基金
国家自然科学基金项目(50975137
51375231)
高等学校博士学科点专项科研基金项目(20133218110030)
江苏省高校优势学科建设工程资助项目
