高浓度纳米氧化铈料浆中颗粒的分散行为

Dispersion Behavior of Particles in Concentrated Nano-ceria Slurries

准确探明高浓度纳米氧化铈料浆中颗粒的分散行为,可为其在抛光中充分发挥尺度效应提供依据。制备了2种纳米氧化铈的高浓度料浆,从料浆相对粘度和颗粒粒度分布及zeta电位等方面研究了颗粒的分散行为。结果表明,基于料浆相对粘度变化趋势可获得优化的分散参量,采用空白基液即原溶液稀释高浓度料浆可有效提高粒度分布测量的浓度上限。结合宏观流变性能和微观粒度分布测量及原溶液稀释技术,可有效研究高浓度料浆中纳米颗粒的分散状态。

Accurate determination of dispersion behavior of nano-ceria particles in concentrated slurries would provide technological bases to exert scale effects of nano-particles in polishing. Two kinds of concentrated slurries of nano-ceria particles and their corresponding original solutions were prepared, and dispersing behavior of particles was studied from the aspects of relative viscosity（RV） of slurries, particle size distribution（PSD） and zeta potential. It is found that the optimal dispersing parameters could be determined according to evolving rules of RV of slurries, and the upper concentration limit of PSD measurement could be improved by diluting concentrated slurries with their original solutions. It is deduced that the dispersing conditions of nano-particles in concentrated slurries could be researched effectively by combination of macroscopic rheological properties, microscopic PSD and dilution with original solutions.