精密离心机结构误差对其运动精度的影响研究

Influence of Structure Error on the Rotary Precision of Precision Centrifuge

目的研究精密离心机结构误差对其运动精度的影响。方法基于LMS Virtual.Lab Motion平台,开展精密离心机主轴回转系统静不平衡量、静压气体轴承铅垂度、转盘与静压气体轴承垂直度等结构误差对主轴半径误差和倾角误差的影响规律研究。结果获得了精密离心机结构误差对其运动精度的影响规律。结论随着主轴回转系统静不平衡量、铅垂度误差和垂直度误差的增大,主轴回转系统的半径误差和倾角误差均线性增加。

Objective To investigate the influence of structure error to the rotary precision of precision centrifuge. Methods Based on the software of LMS Virtual.Lab Motion, the influence of correlative structure error on the rotary precision （i.e., radius error of main shaft, dip error） of precision centrifuge was researched for the representative aerostatic bearing main shaft rotary system. The influence of the plate eccentricity error relative to aerostatic bearing axes and the plumb assembly error of aerostatic bearing axes as well as the plate perpendicularity error relative to aerostatic bearing axes to the rotary error of main shaft was obtained, and the rotary precision of main shaft rotary system was gained. Results The influence pattern of structure error on the rotary precision of precision centrifuge was obtained. Conclusion Along with the increase of the plate eccentricity error relative to aerostatic bearing axes and the plumb assembly error of aerostatic bearing axes as well as the plate perpendicularity error relative to aerostatic bearing axes, the rotary error of main shaft was linearly increased.