基于奇异谱的精密离心机空气轴承主轴回转系统误差分析

Error Analysis of Spindle Rotation System of Precision Centrifuge by Singular Spectrum Analysis

目的提出一种精密离心机主轴回转系统误差分析方法。方法基于奇异谱分析对主轴回转误差的趋势进行提取,采用4个安装指定位置的高精度传感器测量轴回转相对位置变化,对数据进行奇异谱分析,采用差分奇异谱的准则来确定重构数据所需的基本分解信号,重构获得的数据为测量数据的趋势部分,即为主轴回转的系统误差。结果重构获得的数据趋势在各个转速下均与实测结果趋势基本一致。结论基于奇异谱分析的精密离心机空气轴承主轴回转误差趋势分析方法能够有效地用于补偿修正该系统误差。

Objective To provide a method for error analysis of spindle rotation system of precision centrifuge. Methods Based on singular spectrum analysis （SSA）, the tendency of system error was extracted. Four high-precision sensors were used to measure the relative position changes of the spindle. Signal reconstruction was decomposed by differential-SSA and the data tendency were obtained, i.e., the spindle rotation system error. Results The tendency by reconstruction was consistent with the measured results at each speed. Conclusion This method could be used to compensate the spindle rotation system error of precision centrifuge.