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Effects of N_2/O_2 flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering

Effects of N_2/O_2 flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering
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摘要 NiTi shape memory alloys(SMA) have many biomedical applications due to their excellent mechanical and biocompatible properties. However, nickel in the alloy may cause allergic and toxic reactions, which limit some applications. In this work, titanium oxynitride films were deposited on NiTi samples by high vacuum magnetron sputtering for various nitrogen and oxygen gas flow rates. The x-ray diffraction(XRD) and x-ray photoelectron spectroscopy(XPS) results reveal the presence of different phases in the titanium oxynitride thin films. Energy dispersive spectroscopy(EDS) elemental mapping of samples after immersion in simulated body fluids(SBF) shows that Ni is depleted from the surface and cell cultures corroborate the enhanced biocompatibility in vitro. NiTi shape memory alloys(SMA) have many biomedical applications due to their excellent mechanical and biocompatible properties. However, nickel in the alloy may cause allergic and toxic reactions, which limit some applications. In this work, titanium oxynitride films were deposited on NiTi samples by high vacuum magnetron sputtering for various nitrogen and oxygen gas flow rates. The x-ray diffraction(XRD) and x-ray photoelectron spectroscopy(XPS) results reveal the presence of different phases in the titanium oxynitride thin films. Energy dispersive spectroscopy(EDS) elemental mapping of samples after immersion in simulated body fluids(SBF) shows that Ni is depleted from the surface and cell cultures corroborate the enhanced biocompatibility in vitro.
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第7期321-326,共6页 中国物理B(英文版)
基金 Project supported by the Higher Education Commission,Hong Kong Research Grants Council(RGC)General Research Funds(GRF),China(Grant No.112212) the City University of Hong Kong Applied Research Grant(ARG),China(Grant No.9667066)
关键词 titanium oxynitride films magnetron sputtering biocompatibility titanium oxynitride films,magnetron sputtering,biocompatibility
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