基于电容传感器的孔径测量装置

A measuring method for microporous based on capacitance sensors

针对孔径尺寸的测量问题,将电容传感器应用到孔径测量中,提出了一种基于四点式电容传感器的测量方法。对电容传感器工作原理进行了分析,完成了非接触四点式电容传感器的整体设计和测头的结构设计,建立了电容传感器与孔径尺寸之间的关系。通过对不同直径的孔径进行模拟测量,验证该测量方法的可行性。研究表明,基于四点式电容传感器的测量方法不仅结构简单,还为不同直径的孔径测量提供了可能。

For the problem of measuring the dimensions of the hole, the technology about capacitance sensor was applied to the aperture measurement in this paper, which proposes a method to measurement based on the four-point capacitance sensor. This paper gives the analysis of the working principle of capacitance sensor, completes the overall design of the four-point non-contact type capacitance sensors including the design about structure of four point capacitive sensor and capacitance sensor, establishes the relationship between the capacitance and the pore size. To verify the feasibility of the method to measurement, we carry out the aperture diameter to simulate different measurements. Research shows that the experimental results show the advantages of measuring method of capacitance sensor applied to the aperture measurement, and make it possible to measure the different aperture diameters.