大量程纳米位移传感器的微纳加工制造

Micro-nano fabrication of large range nanometer displacement sensor

针对解决大量程纳米位移精度测量难度大的问题,提出了新型纳米时栅传感器。就大量程、高精度位移传感器的亚微米精度加工而言,宏观尺度范围内周期性结构单元一致性制造是保证位移传感器可靠性和高精度测量的关键所在。对上述提出的问题,采用高精度自动拼接曝光技术加工并实现了大量程标尺的图形转移,结合微纳加工方式实现时栅传感器亚微米级精度的制造。通过实验验证所加工出的样机能够达到预期目标,并且测量误差峰值在500 nm以内。

Aiming at the difficulty of the large range nano displacement precision measurement,a new type nanometer time grating sensor is proposed. As for submicro precision of large range,high-precision displacement sensor,consistent manufacture in macro-scale range periodic structure of unit are the key to ensure reliability and high precision measurement of displacement sensor. Aiming at problem raised above,a new high-precision automatic exposure splicing technology is adopted,fabricate and achieve large range scale pattern transfer,and combined with micro-nano fabrication methods,the sub-micron level precision time grating sensor manufacturing is realized. The experimental results show that the prototype can work as expected,and peak of measurement error is within 500 nm.