用于多光束精密聚焦的大型过渡锥体设计

Design of large-scale cone parts applied to multi-beam focusing

根据高功率准分子激光打靶系统的要求,确定了18束激光的空间排布方式,在此基础上设计了用于安装聚焦透镜的过渡锥体。使用有限元分析软件ANSYS对过渡锥体在真空状态下的结构变形进行了模拟计算,根据结果计算出了理想透镜焦点的偏移量,在此基础上对过渡锥体进行了结构优化设计。设计了过渡锥体的独特支撑结构,采用该结构可以对过渡锥体进行六维调整并实现与靶室精密对接。实际物理验证实验表明,该过渡锥体调整方式设计合理、调整简单方便,真空条件下透镜焦点偏移量小于0.5 mm,完全满足多光束激光打靶物理实验的要求。

Based on the physical requirements of high power excimer laser targeting system,the spatial arrangement of 18 laser beams was designed and then the cone part was designed on which focusing lens are mounted. The finite element software ANSYS was used to analyse the deformation of the cone part under vacuum,then the offsets of lens focus were calculated,and the structure of cone part was designed optimally. The special supporting structure was designed,which makes it feasible to adjusting cone part in six dimensions. The physical experiment proves that the cone part＇s adjusting style is designed simple and adjustment of the cone part is convenient and simple,and the offsets of 18 lens focuses are less than 0. 5mm under vacuum,which satisfy the optical experiment＇s physical requirements.