一种基于主成分分析的多波长相移干涉测量方法

Multi-Wavelength Phase-Shifting Interferometry Based on Principal Component Analysis

提出一种基于主成分分析(PCA)的多波长同轴共路同时相移干涉测量方法。所提方法可以通过从单色CCD记录的一系列相移量未知的多波长同时相移干涉条纹图,利用主成分分析提取出单个波长下的包裹相位分布,继而通过多波长的方法进行相位解包和降噪处理得到合成波长的相位。数值模拟和实验结果表明,所提方法不仅测量过程简单,而且运算速度快,测量精度高。

A technique combined multi- wavelength phase- shifting interferometry with principal component analysis（PCA） is presented. By using a monochrome CCD to simultaneously capture a sequence of in-line phaseshifting interferograms with random and unknown phase shifts at multiple wavelengths, the wrapped phase information of each wavelength can be constructed through using the PCA algorithm. Then an unambiguous phase of an extended synthetic beat wavelength can be determined by multi-wavelength optical phase unwrapping and noise reduction. Both the numerical simulation and experimental results show the simple optical measurement process, fast computing speed and high resolution of the proposed method.