陶瓷基钯－银合金氢气传感器的研究

Study of Pd/Ag Alloy Hydrogen Sensor Supported on Ceramics Substrate

氢气传感器研制的核心问题在于高品质氢气敏感材料的选择；氢气传感器的工作特性则由氢气敏感材料的响应性、稳定性和重复性等所决定。本文采用钯－银合金作为氢气敏感材料，利用磁控溅射技术制备出薄膜式氢气传感器，并对该传感器的性能进行了测试。实验结果表明，在0～30％氢气浓度范围内，该传感器表现出良好的线性输出特性，具有较高的灵敏度和较好的响应重复性，且传感器的响应信号强度和响应时间均随着温度的升高而减小，而湿度及压力对氢气传感器检测性能的影响很小。

Developing quality hydrogen sensitive material is the core problem of hydrogen sensor. The sensor performance was determined by sensitive response, reproducibility and recovery of hydrogen material. Palladium silver alloy was used as hydrogen sensitive material in this paper. A thin film hydrogen sensor was prepared by using magnetron sputtering system. Testing results indicate that the sensor has a good linear output performance at 0～30% hydrogen concentration range, and demonstrates a high responsiveness and good repeatability. The strength of responsive signal of the sensor decreases while temperature increases, and its responsive time was shorterl as the temperature increases. Humidity and pressure have little im- pact on detection performance of hydrogen sensor.