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纳米压痕法表征BNT薄膜的压电性能

Identification of Piezoelectric Properties of BNT Thin Films by Nanoindentation Method
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摘要 利用有限元方法模拟了BNT薄膜/基底体系的纳米压痕过程,分析讨论了BNT薄膜的压电参数对加载的最大压痕载荷、加载曲线指数的影响,用量纲分析结合有限元方法建立了压痕的加载参数和BNT薄膜的压电参数的无量纲关系. In this paper,the finite element method（FEM）has been employed to study the nanoindentation experiment of BNT thin film/substrate systems.The influences of the piezoelectric properties of BNT thin films on the maximum indentation load and loading curve index have been analyzed.Using dimensional analysis and finite element computation method,the corresponding dimensionless relationship between the loading parameters and piezoelectric properties of BNT thin films has been obtained.
作者 廖艳果 胡和平 郑学军
机构地区 南华大学数理学院 湘潭大学低维材料及其应用教育部重点实验室
出处 《湘潭大学自然科学学报》 CAS 北大核心 2015年第3期9-14,共6页 Natural Science Journal of Xiangtan University
基金 湖南省科技厅项目(2012GK3136) 湖南省衡阳市科技局项目(2011KJ75)
关键词 有限元方法 加载曲线 压电参数 无量纲关系 finite element method（FEM） loading curve piezoelectric properties dimensionless relationship
分类号 TN384 [电子电信—物理电子学]
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参考文献11

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湘潭大学自然科学学报
2015年 第3期

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