衍射光栅外差激光干涉法角振动校准技术研究

Angle Vibration Calibration Technology by Diffraction Grating Heterodyne Laser Interferometry

开展了角加速度校准方法的研究和基准装置的研制。介绍研制的稳态正弦角振动激励系统和衍射光栅马赫-泽德干涉仪，以及结合采用正弦逼近法外差测量技术。角加速度国家计量基准装置在角振动频率0．05Hz～1．2kHz、角位移大于300。和角加速度大于2000rad／s^2测量范围内，可实现角加速度幅值和相位的精确测量。实验数据和测量不确定度分析结果表明，装置校准高精度角加速度传感器的测量扩展不确定度优于1％（k=2）。

The research of calibration method and development of the angular acceleration national primary standard device has been carried out by NIM. The developed steady-state sine angle vibration excitation system, the developed diffraction grating Mach-Zehnder interferometer and heterodyne measurement technology of sinusoidal approximation method are described. The angular acceleration national primary standard device can realize accurate measurement of angular acceleration ampltiude and phase in the measurement range of angle vibration frequency of 0.05 Hz to 1.2 kHz, angular displacement over 300° and angular acceleration over 2000 rad/s2. The experimental data of high-precision angular accelerometer and analysis result of the measurement uncertainty show that the expanded uncertainty of the measurement is better than 1% （ k = 2）.