硬脂酸高温质子交换α相铌酸锂光波导的制备技术研究

The study of stearic acid HTPEα-phase LiNbO_3 optical waveguide preparation technology

采用稀释硬脂酸和高温质子交换技术,研究了单偏振α相铌酸锂光波导的制备工艺。开发了一种高温密闭装置,通过提高蒸汽压的方法实现了350℃质子交换。波导折射率分布测试采用了棱镜薄膜耦合m线技术结合统计迭代法拟合的方法,晶相分析采用了红外吸收光谱技术。实验结果表明,掺入1.1%硬脂酸锂质量比例的硬脂酸作为缓冲质子源,经350℃/6h高温质子交换,可以形成α相铌酸锂光波导,稀释度为1.3%时,同样的温度/时间条件下,可以获得632.8nm单模α相铌酸锂光波导。

The preparation process of single polarizationα-phase LiNbO3 optical waveguide is studied using dilution of stearic acid and high temperature proton exchange technology.A high temperature sealing device is developed.A method by increasing vapor pressure to achieve the350 ℃ proton exchange is proposed.Waveguide refractive index distribution is tested by using prism film coupling m-line technology and the statistical iterative method fitting.Crystal phase is analyzed by testing infrared absorption spectrum technique.The experimental results show thatα-phase LiNbO3 optical waveguide can be produced under the conditions of the stearic acid doped with 1.1%lithium stearate mass proportion as buffer proton source and 350℃/6hhigh temperature proton exchange.Single modeα-phase LiNbO3 optical waveguide at 632.8nm wavelength can be produced under the conditions of the same temperature,time and the dilution of 1.3%.