GCr15钢领基体磁控溅射类金刚石薄膜的工艺

Study of Diamond- Like Carbon Film Prepared by Magnetron Sputtering on Surface of GCr15 Rings

为了提高钢领表面耐磨性,采用中频非平衡磁控溅射法在经热处理的GCr15钢领上制备了类金刚石(DLC)薄膜,并对不同磁控溅射功率、负偏压下制备的DLC薄膜进行了组织结构分析和摩擦磨损性能测试。结果表明:随着溅射功率、负偏压增加,DLC薄膜的Raman谱G峰位置和ID/IG值均整体上呈增加趋势,sp3键含量减少,石墨化程度增加;负偏压恒定为100 V时功率为8 k W以及功率恒定为5 k W时负偏压120 V,制备的DLC薄膜具有较小的摩擦系数和稳定的抗磨损性能。

To improve abrasion resistance of the rings surface,diamond-like carbon(DLC) film was prepared on the GCrl5 rings after heat treatment by medium frequency unbalanced magnetron sputtering.The microstructure analysis and friction & wear tests of the DLC film under different powers and negative bias voltages were studied.Results showed that as the power and negative bias voltage increased,the position of G peak in the Raman spectrum of DLC film and the value of I_D/I_G generally increased,and the content of sp^3 bonds decreased,showing increased degree of graphitization.Moreover,when the negative bias voltage and power were 100 V and 8 kW or 120 V and 5 kW,the DLC films had smaller friction coefficient and more stable wear resistance.