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类金刚石涂层的研究进展及其应用 被引量:10

Research progress and application of diamond-like carbon coating
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摘要 类金刚石(Diamond-like carbon,DLC)涂层具有良好的减摩、耐磨性能,已成为当前研究的热点。由于受基体材料的成分,以及DLC涂层材料与基体材料的性质不同的影响,制备的涂层内应力较大,与基体的结合力差。添加过渡层,掺杂第三元素和制备多层结构涂层是提高界面结合力与热稳定性的有效措施。介绍了类金刚石薄膜的性质、制备工艺以及在金属加工、汽车零部件、医疗器械、航空航天等领域的应用,展望了类金刚石涂层的应用前景与发展趋势。 Diamond-like carbon (DLC)coating has excellent antifriction and wear resistance, which has become a hot spot of current research. Due to the effect of substrate material composition, as well as the difference between DLC coating material properties and substrate material properties, the DLC coating has large internal stress, lead- ing to bad bonding between the coating and substrate. Adding a transition layer, doping the third element and pre- paring multilayer structure coating are effective ways to improve the interface bonding strength and thermal stabili- ty. The properties, preparation techniques of DLC coating, as well as its application in metal processing, automo- tive, medical equipment, aerospace and other fields were introduced, the application prospect and development ten- dency of DLC coating were also proposed.
作者 张而耕 陈强
出处 《粉末冶金工业》 CAS 北大核心 2015年第5期60-65,共6页 Powder Metallurgy Industry
基金 上海市教委创新基金(12YZ160) 上海市联盟计划(L201203 L201308)
关键词 类金刚石 物理气相沉积 自润滑 元素掺杂 涂层 diamond-like carbon physical vapor deposition self lubricating element doping coating
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