摘要
为了提高激光打孔生产质量和降低生产成本,提出了一种多棱镜旋转扫描非球面透镜聚焦在线打孔方案。系统将CO2激光器发出的连续光束经光调制器入射在多棱镜的其中一个表面上,光束经过反射依次扫入聚焦透镜组中。由于轴外像差和扫描速度失真会引起聚焦光斑的线性畸变,从而导致打孔形状的变化,通过选取非球面透镜对光束整形,在聚焦同时调整聚焦光斑的形状以控制打孔的形状。结果表明,在扫描系统中线性误差可控制在0.5%内,打孔大小形状满足生产要求,与传统激光打孔方式相比,提高了打孔的质量与效率。
This paper presents a focusing online drilling method of polygon mirror rotational scan a spherical lens to improve the production quality and reduce the production cost of laser drilling. The continuous beam emitted by CO2 laser is converged onto one of the upper surface of the polygon mirror via the optical modulator, and then the reflected light beams successively sweep into the focusing lens group. Since the linear distortion of focus spot, caused by off-axis aberration and the distortion of scanning speed, can lead to changes of the punch shape, aspherie focusing lens are used for beam shaping so that the shape of punch can he controlled by adjusting the shape of focus spot while focusing. The results show that the linearity error of scanning system can be controlled within 0. 5%. This method improves the quality and efficiency of drilling compared with the conventional laser drilling methods.
出处
《电子科技》
2015年第11期61-64,共4页
Electronic Science and Technology
基金
江苏省南京市应用技术研究计划基金资助项目(1421007)
关键词
激光技术
打孔
旋转多棱镜
聚焦透镜
光束整形
laser technology
drilling
rotating polygon
focusing lens
beam shaping
