激光束斜入射时光斑能量分布的实验测试

Experimental Test on Light Spot Energy Distri b ution in the O b lique Incident Laser Beam

本文提出了一种新型的测量微角位移系统．结合了二维PSD位置探测器，通过实验得出光斑中心位置随角度偏移量的变化关系，继而得到在实际应用中测量微角位移的方法．

This paper proposes a new kind of micro angular displacement measuring system . Combined the two-dimensional PSD position detector, the spot center location have been determined with the change of the deviation of the Angle,then a method is get to measure micro angular displacement in practical application.