摘要
提出一种基于双色同轴多光束阵列的多参数在线光学传感器,该传感器可进行多层膜的各种单晶、多晶和非晶结构材料镀膜过程的现场生长率和应力等参数的测量,与计算机自动控制系统相结合,可以实现镀膜工艺过程的闭环生产,达到提高产品质量的目的。
This article presents a multi-parameter online optical sensor device based on double-color coaxial multiple beam array,by which the parameters of amorphous growth rate and stress in deposition process of various single crystal,live polycrystalline and amorphous structure material with multilayer films can be measured. If combined with computer automatic control system,the device can achieve the closed-loop production of coating process,thus improving the quality of products.
出处
《扬州职业大学学报》
2015年第2期37-40,共4页
Journal of Yangzhou Polytechnic College
