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晶硅片切割废砂浆中碳化硅的旋流工艺研究 被引量:1

Study on hydrocyclone technology of silicon carbide from cutting waste slurry of silicon wafe
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摘要 以羧甲基纤维素钠为分散剂,采用旋流法分离废砂浆中的碳化硅和硅粉,研究了固液比、温度、入口速度、分散剂的用量对分离效果的影响。结果表明,当固液比(料饼与水质量比)为15%、温度为50℃、入口速度为12.5 m/s、羧甲基纤维素钠加入量(质量分数)为0.6‰时分离效果最佳,在此条件下回收的碳化硅纯度为96.5%。该研究达到了分离碳化硅和硅粉的目的,同时减少了后续工艺辅料酸碱的应用,降低了对环境的污染。 Silicon carbide (SiC) and silicon (Si) powder in the cutting waste slurry of silicon wafe were separated by the hydro- cyclone technology with carboxymethylcellul0se sodium (CMC) as dispersing agent.The effects of the solid to liquid radio, temperature, inlet velocity, and the dosage of CMC on separation efficiency were investigated.Results showed that the purity of the recovered silicon carbide powder was up to 96.5% under the solid to liquid ratio(mass ratio of feed cake and water) of 15%, temperature of 50 ℃, inlet velocity of 12.5 m/s and mass fraction of CMC of 0.6%.In addition, the research got the purpose of separating silicon carbide and silicon powder, the dosage of acid and alkali was also cut in the follow-up processes, and the environmental pollution was reduced.
出处 《无机盐工业》 CAS 北大核心 2015年第11期60-62,共3页 Inorganic Chemicals Industry
关键词 废砂浆 旋流 分散剂 碳化硅 硅粉 waste slurry hydrocyclone dispersing agent silicon carbide silicon powder
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参考文献11

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