摘要
主要介绍了高纯硅烷的用途、生产意义、产品现状,详细介绍了现有的生产工艺,分析其优缺点。提出改进的氯硅法工艺,产品纯度能达到99.9999999%,该技术具有完全自主知识产权,可打破国外技术垄断,缓解我国高纯硅烷长期依赖进口的局面。
The effect of production and actuality of high - purity silane are introduced, the existing process and their advantages and disadvantages are introduced in detail. The improved chloride process is presen- ted, and thepurityof product can reach above 99. 9999999%. This techniques has fully independent intel- lectual property,carrying on this research has significant meaningsfor breaking the overseas technical mo- nopoly and ease dependence onforeignimports.
出处
《河南化工》
CAS
2015年第10期15-17,共3页
Henan Chemical Industry
关键词
硅烷
纯度
改进氯硅法
silane
purity
improved Chloride process
